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Microelectromechanical systems
Results: 938

#	Item
881	Free registration on www.i-micronews.com ISSUE Add to Reading List Source URL: www.i-micronews.com Language: English - Date: 2013-10-06 08:54:48 Microtechnology Semiconductor device fabrication Electrical engineering Mechanical engineering Microelectromechanical systems Transducers EV Group Gallium nitride Silicon carbide Chemistry Materials science Technology
882	Microsoft PowerPoint - RRand_MEMS.ppt Add to Reading List Source URL: powerhead.planet.ee Language: English - Date: 2011-02-17 13:39:33 Sensors Materials science Engineering Accelerometers MEMS sensor generations Microelectromechanical systems Pressure sensor Capacitor Technology Microtechnology Transducers
883	For immediate release: “Glass wafer market will reach more than 15M 8” EQ WSPY Add to Reading List Source URL: www.yole.fr Language: English - Date: 2013-04-12 11:45:38 Semiconductor device fabrication Electrical engineering Microtechnology Nanotechnology Microelectromechanical systems Transducers Integrated circuit Wafer Sensonor Materials science Technology Electromagnetism
884	SIMTech Technical Report (PT[removed]JT) Chemical Mechanical Planarization Add to Reading List Source URL: maltiel-consulting.com Language: English - Date: 2013-04-20 18:07:00 Technology Chemical-mechanical planarization Copper interconnect Microelectromechanical systems Etching Surface finishing Surface micromachining Shallow trench isolation Photolithography Semiconductor device fabrication Materials science Microtechnology
885	Microsoft PowerPoint - ELOY Semicon West Mems presentation 2011 V2 Add to Reading List Source URL: semiconwest.org Language: English - Date: 2011-07-19 17:39:07 Mechanical engineering Microelectromechanical systems Transducers Yole Accelerometer Microphone Gyroscope Semiconductor Equipment and Materials International Electromagnetism Technology Microtechnology Electrical engineering
886	JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9 Add to Reading List Source URL: www.soitec.com Language: English - Date: 2010-12-09 11:08:13 Technology Silicon on insulator Thermal oxidation Ion implantation Wafer Microelectromechanical systems Silicon on sapphire Smart Cut Epitaxy Semiconductor device fabrication Materials science Microtechnology
887	227 Introduction to Micro-Electro-Mechanical Systems (MEMS) Add to Reading List Source URL: www.nectec.or.th Language: English - Date: 2003-02-18 23:39:28 Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Deformable mirror Microfabrication Surface micromachining Micromachinery Bulk micromachining Beam steering Microlens Microtechnology Materials science Technology
888	An Introduction to MEMS (Micro-electromechanical Systems) Add to Reading List Source URL: www.lboro.ac.uk Language: English - Date: 2012-11-01 04:16:41 Micro-Opto-Electro-Mechanical Systems Microelectromechanical systems Microfabrication Surface micromachining Micromachinery Microsystem Semiconductor Equipment and Materials International Bio-MEMS RF MEMS Microtechnology Materials science Technology
889	Synchrotron-radiation-induced anisotropic wet etching of GaAs* Qing Ma, Derrick C. Mancini, and Richard A. Rosenberg Advanced Photon Source, Argonne National Laboratory, Argonne, IL[removed]USA Add to Reading List Source URL: www.aps.anl.gov Language: English - Date: 2007-10-30 12:38:14 Semiconductor device fabrication Etching Deep reactive-ion etching Photolithography Gallium arsenide Industrial etching Microelectromechanical systems Microtechnology Materials science Chemistry
890	SANDIA REPORT SAND2008-6088 Unlimited Release Add to Reading List Source URL: www.sandia.gov Language: English - Date: 2011-11-10 13:22:25 Semiconductor device fabrication Technology Microtechnology Coatings Nanotechnology Chemical vapor deposition Thin film Microelectromechanical systems Evaporation Chemistry Thin film deposition Materials science

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